Development of a DC to K-Band Ultra Long On-Life RF MEMS Switch with Integrated Driver Circuitry

被引：0
|
作者：
Carty, Eric [1 ]
Fitzgerald, Padraig [1 ]
McDaid, Padraig [1 ]
Stenson, Bernard [1 ]
Goggin, Raymond [2 ]
机构：
[1] Analog Devices Inc, Raheen Business Pk, Limerick, Ireland
[2] Analog Devices Inc, Bldg 2200,Cork Airport Business Pk. Kinsale Rd, Cork, Ireland
来源：
2016 11TH EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC) | 2016年
关键词：
Driver circuits; Microelectromechanical systems; K-band; Reliability; Switches; Ohmic contacts;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper describes the development of a DC (0Hz) to over 26GHz (K-Band), ultra-long on lifetime single pole dual throw (SPDT) micro-electro-mechanical systems (MEMS) switch with integrated driver circuitry. This paper reports for the first time a novel active (electrostatic) open design that guarantees a greater than 10 years continuously on lifetime (COL) at 85 degrees C, as well as a minimum actuation lifetime of 1 billion cycles. The switch exhibits 1dB of insertion loss and 23dB of off isolation at 26GHz. The switch solution including the driver is packaged in a small 5mm x 4mm x 0.95mm 24-pin quad flat no leads (QFN) plastic package.
引用
收藏
页码：444 / 447
页数：4
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