Compact Camera for Real-Time 3D Measurement Development of MEMS Scanner with High Speed Phase Shift

To improve difficulties inherent to the conventional three-dimensional profiling system based on pattern projection method, we have proposed incorporating a recent digital device such as MEMS scanner into projection optics. We have used the MEMS scanner which is not a digital mirror device (DMD) but a single MEMS mirror. Due to this revision, first of all, such a small size system like a palm-top camera was attainable, and low cost measurement system was potentially realized. In the projection system, a laser diode and the single MEMS mirror are employed. We can control the scanner to produce the projection pattern with an appropriate periodical structure and a sinusoidal intensity distribution. Due to this flexible pattern projection, phase-shifting technique becomes applicable for industrial inspections and measurements in the automobile industry and others. The camera is as small as a photographic digital camera in size. We finally aim at developing a high speed 3D measurement. In this paper, the measurement speed is 0.6 seconds for acquiring 3D profile.