Laser-Plasma Chemistry

被引：0
|
作者：
Red'kin, S. V. [1 ,2 ]
机构：
[1] Russian Acad Sci, Mokerov Inst Ultrahigh Frequency Semicond Elect, Moscow, Russia
[2] MIREA Russian Technol Univ, Moscow, Russia
来源：
NANOBIOTECHNOLOGY REPORTS | 2022年 / 17卷 / SUPPL 1期
关键词：
laser; plasma-chemical etching; polycrystalline diamond; single-crystal sapphire; plate; crystal;
D O I：
10.1134/S2635167622070163
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Most currently existing laser methods for separating plates into crystals are analyzed. A technique for eliminating overheating of the substrate, its melting, modification, and release of material to the surface is proposed: local laser-plasma-chemical etching using the example of polycrystalline diamond and single-crystal sapphire. The operating pressure range is 6 x 10(-4)-1 x 10(-1) Torr.
引用
收藏
页码：S61 / S67
页数：7
相关论文
共 50 条
  • [1] Laser-Plasma Chemistry
    S. V. Red’kin
    Nanobiotechnology Reports, 2022, 17 : S61 - S67
  • [2] Laser-plasma chemistry: principles and applications
    Matulkova, Irena
    Juha, Libor
    XIX INTERNATIONAL SYMPOSIUM ON HIGH-POWER LASER SYSTEMS AND APPLICATIONS 2012, 2013, 8677
  • [3] High-power laser-plasma chemistry in planetary atmospheres
    Civis, Svatopluk
    Juha, Libor
    IAU: ORGANIC MATTER IN SPACE, 2008, (251): : 473 - +
  • [4] High-power laser-plasma chemistry in planetary atmospheres
    Juha, Libor
    Ferus, Martin
    Kubelik, Petr
    Krasa, Josef
    Skala, Jiri
    Pfeifer, Miroslav
    Civis, Svatopluk
    Cihelka, Jaroslav
    Babankova, Dagmar
    ASTROBIOLOGY, 2007, 7 (03) : 516 - 517
  • [5] Laser-plasma diagnostics
    Gizzi, L. A.
    LASER-PLASMA ACCELERATION, 2012, 179 : 115 - 153
  • [6] LASER-PLASMA DETECTION
    BASOV, NG
    GRASYUK, AZ
    LOSEV, LL
    MESHALKIN, EA
    IZVESTIYA AKADEMII NAUK SSSR SERIYA FIZICHESKAYA, 1986, 50 (06): : 1087 - 1094
  • [7] LASER-PLASMA DETECTION
    VASILIEV, BI
    GRASYOUK, AZ
    LOSYEV, LL
    MESHALKIN, EA
    ZHURNAL EKSPERIMENTALNOI I TEORETICHESKOI FIZIKI, 1986, 90 (05): : 1635 - 1645
  • [8] Lasers for laser-plasma acceleration
    Musgrave, I. O.
    LASER-PLASMA ACCELERATION, 2012, 179 : 65 - 92
  • [9] NONLINEAR LASER-PLASMA INTERACTIONS
    HUGHES, TP
    NUCLEAR FUSION, 1973, 13 (06) : 948 - 948
  • [10] Laser-plasma research at MPQ
    Sigel, R.
    Baumhacker, H.
    Brederlow, G.
    Eidmann, K.
    Fill, E.
    Massen, J.
    Meyer-ter-Vehn, J.
    Schwanda, W.
    Stoeckl, Ch.
    Tsakiris, G.D.
    Volk, R.
    Witkowski, S.
    Witte, K.J.
    1600, (11):
12345