Microassembly of 3D micro-mirrors as building elements for optical MEMS switching

被引：4
|
作者：
Dechev, Nikolai [1 ]
Basha, Mohamed [2 ]
Chaudhuri, Sujeet K. [2 ]
Safavi-Naeini, Safieddin [2 ]
机构：
[1] Univ Victoria, POB 3055,STN CSC, Victoria, BC V8W 3P6, Canada
[2] Univ Waterloo, Elect & Comp Engn, Waterloo, ON N2L 3G1, Canada
来源：
OPTOMECHATRONIC MICRO/NANO DEVICES AND COMPONENTS II | 2006年 / 6376卷
关键词：
D O I：
10.1117/12.686579
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
A robotic-based microassembly process has been successfully applied to the construction of a novel micro-mirror design for use in optical switching. This paper is devoted to the description of the microassembly process used to construct the 3D micro-mirror. The microassembly process is based upon the PMKIL (Passive Microgripper, Key and Inter-Lock) assembly system. Details of the assembly process include, the methodology to construct the micro-mirror, the design of the micro-mirror parts, and the design of the tools (microgrippers) that are mounted to the robot to handle the micro-parts. The results of the assembly process are presented, along with examples of prototype 3D micro-mirrors. The entire 3D micro-mirror consists of a novel electro-static rotary motor, onto which the 3D mirror structure is assembled. The 3D micro-mirror is used as a building element for 1xN optical switching systems and for NxM optical cross-connects.
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页数：12
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