Development of the Space Charge Measurement System for High Temperature using MEMS-PZT

被引：0
|
作者：
Kobayashi, Miho [1 ]
Sato, Kosuke [1 ]
Miyake, Hiroaki [1 ]
Tanaka, Yasuhiro [1 ]
Kanda, Kensuke [2 ]
机构：
[1] Tokyo City Univ, Tokyo, Japan
[2] Univ Hyogo, Kobe, Hyogo, Japan
来源：
2022 IEEE CONFERENCE ON ELECTRICAL INSULATION AND DIELECTRIC PHENOMENA (IEEE CEIDP 2022) | 2022年
关键词：
D O I：
10.1109/CEIDP55452.2022.9985346
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Space charge has been measured by the pulsed electro acoustic (PEA) method to evaluate the performance of insulating materials. Recently, there has been a demand to evaluate the performance of insulating materials on high temperature environments [1][2][3]. However, P(VDF-TrFE), which is commonly used in conventional space charge distribution measurement device as a sensor, has a Curie temperature of 120., so it is difficult to perform measurements at high temperature. Therefore, we are developing a piezoelectric sensor using Lead Zirconate titanate (PZT), which has high heat resistance. In this paper, we made a piezoelectric sensor using MEMS-PZT, and investigated the piezoelectric property and thermal resistance.
引用
收藏
页码：244 / 247
页数：4
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