Simulation and fitting of high resolution Rutherford backscattering spectra

被引：5
|
作者：
Borschel, Christian [1 ]
Schnell, Martin [2 ]
Ronning, Carsten [1 ]
Hofsaess, Hans [2 ]
机构：
[1] Univ Jena, Inst Solid State Phys, D-07743 Jena, Germany
[2] Univ Gottingen, Inst Phys 2, D-37077 Gottingen, Germany
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2009年 / 267卷 / 8-9期
关键词：
RBS; Data analysis; Computer simulation; ION-BEAM ANALYSIS; THIN-FILMS; SOFTWARE; RBS;
D O I：
10.1016/j.nimb.2009.01.084
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A computer program for the analysis of high resolution Rutherford backscattering spectra (HR-RBS), which can be recorded with an electrostatic energy analyzer (ESA) and a resolution of about 1 keV, has been developed. The use of an ESA results in various differences compared to conventional RBS spectra, motivating the development of a new algorithm for simulation for these spectra. We present a Monte Carlo based diffusion-like fit approach for evaluation of the HR-RBS spectra, which is in particular useful for fitting concentration gradients. Examples for the application of the algorithm are shown to demonstrate its functionality. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：1737 / 1739
页数：3
相关论文
共 50 条
  • [1] ON THE SHAPES OF HIGH-RESOLUTION RUTHERFORD BACKSCATTERING SPECTRA
    BUTLER, JW
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3): : 516 - 520
  • [2] SIMULATION OF RUTHERFORD BACKSCATTERING SPECTRA - RETROGRADE METHOD
    SERRUYS, Y
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 61 (02): : 221 - 225
  • [3] ALGORITHMS FOR THE RAPID SIMULATION OF RUTHERFORD BACKSCATTERING SPECTRA
    DOOLITTLE, LR
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 9 (03): : 344 - 351
  • [4] AUTOMATIC ITERATIVE FITTING OF RUTHERFORD BACKSCATTERING SPECTRA FROM MULTIELEMENT SAMPLES
    ERIDON, JM
    WAS, GS
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1985, 12 (04): : 505 - 514
  • [5] BACKGROUND IN PROTON RUTHERFORD-BACKSCATTERING, ALPHA RUTHERFORD-BACKSCATTERING AND C-12-RUTHERFORD-BACKSCATTERING SPECTRA
    WEBER, A
    FAZLY, Q
    MOMMSEN, H
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1984, 4 (01): : 79 - 87
  • [6] GRAPHICAL ANALYSIS OF RUTHERFORD BACKSCATTERING SPECTRA
    LEITE, CVB
    BAPTISTA, GB
    MONTENEGRO, EC
    PASCHOA, AS
    [J]. JOURNAL OF RADIOANALYTICAL AND NUCLEAR CHEMISTRY, 1985, 90 (01) : 145 - 150
  • [7] Improvement of sensitivity in high-resolution rutherford backscattering spectroscopy
    Nakajima, Kaoru
    Hashimoto, Hiroki
    Kimura, Kenji
    [J]. Journal of the Vacuum Society of Japan, 2013, 56 (09) : 355 - 359
  • [8] Improvement of sensitivity in high-resolution Rutherford backscattering spectroscopy
    Hashimoto, H.
    Nakajima, K.
    Suzuki, M.
    Sasakawa, K.
    Kimura, K.
    [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2011, 82 (06):
  • [9] DOUBLE SCATTERING IN RUTHERFORD BACKSCATTERING SPECTRA
    WEBER, A
    MOMMSEN, H
    SARTER, W
    WELLER, A
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 198 (2-3): : 527 - 533
  • [10] ON THE AMBIGUITY IN THE ANALYSIS OF RUTHERFORD BACKSCATTERING SPECTRA
    ALKEMADE, PFA
    HABRAKEN, FHPM
    VANDERWEG, WF
    [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1990, 45 (1-4): : 139 - 142
12345