Nonlinear silicon photonics on CMOS-compatible tellurium oxide

被引：10

作者：

Singh, Neetesh ^{[1
,2
,3
]}

Mbonde, Hamidu M. ^{[4
]}

Frankis, Henry C. ^{[4
]}

Ippen, Erich ^{[3
]}

Bradley, Jonathan D. B. ^{[4
]}

Kaertner, Franz X. ^{[1
,2
]}

机构：

[1] Ctr Free Electron Laser Sci CFEL DESY, D-22607 Hamburg, Germany

[2] Univ Hamburg, D-22607 Hamburg, Germany

[3] MIT, Res Lab Elect, Cambridge, MA 02139 USA

[4] McMaster Univ, Dept Engn Phys, Hamilton, ON L8S 4L7, Canada

来源：

PHOTONICS RESEARCH | 2020年 / 8卷 / 12期

基金：

加拿大自然科学与工程研究理事会;

关键词：

SUPERCONTINUUM GENERATION; WAVE-GUIDES; 2ND-HARMONIC GENERATION; 3RD-HARMONIC GENERATION; TUNGSTEN TELLURITE; OPTICAL PROPERTIES; EFFICIENT; GLASSES; GAIN; DISPERSION;

D O I：

10.1364/PRJ.400057

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Silicon photonics is coming of age; however, it is still lacking a monolithic platform for optical sources and nonlinear functionalities prompting heterogeneous integration of different materials tailored to different applications. Here we demonstrate tellurium oxide as a complementary metal oxide semiconductor silicon photonics platform for nonlinear functionalities, which is already becoming an established platform for sources and amplifiers. We show broadband supercontinuum generation covering the entire telecom window and show for the first time to our knowledge third-harmonic generation in its integrated embodiment. Together with the now-available lasers and amplifiers on integrated TeO2 this work paves the way for a monolithic TeO2-based nonlinear silicon photonics platform. (C) 2020 Chinese Laser Press

引用

页码：1904 / 1909

页数：6

共 50 条

[1] Nonlinear silicon photonics on CMOS-compatible tellurium oxide
NEETESH SINGH
HAMIDU M.MBONDE
HENRY C.FRANKIS
ERICH IPPEN
JONATHAN D.B.BRADLEY
FRANZ X.K?RTNER
[J]. Photonics Research, 2020, 8 (12) : 1904 - 1909
[2] Development of CMOS-compatible integrated silicon photonics devices
Izhaky, Nahum
Morse, Michael T.
Koehl, Sean
Cohen, Oded
Rubin, Doron
Barkai, Assia
Sarid, Gadi
Cohen, Rami
Paniccia, Mario J.
[J]. IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2006, 12 (06) : 1688 - 1698
[3] Nanostructured Silicon Photonics Devices Fabricated by CMOS-Compatible Process
Baba, Toshihiko
[J]. 2012 PHOTONICS GLOBAL CONFERENCE (PGC), 2012,
[4] CMOS-Compatible Fabrication, Micromachining, and Bonding Strategies for Silicon Photonics
Heck, John
Jones, Richard
Paniccia, Mario J.
[J]. ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS IV, 2011, 7927
[5] CMOS-Compatible Contact Technology for Si Photonics
Rodriguez, Philippe
Ghegin, Elodie
Nemouchi, Fabrice
[J]. 2018 18TH INTERNATIONAL WORKSHOP ON JUNCTION TECHNOLOGY (IWJT), 2018, : 41 - 46
[6] Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths
Romero-Garcia, Sebastian
Merget, Florian
Zhong, Frank
Finkelstein, Hod
Witzens, Jeremy
[J]. OPTICS EXPRESS, 2013, 21 (12): : 14036 - 14046
[7] Embedded Silicon Nanoparticles as Enabler of a Novel CMOS-Compatible Fully Integrated Silicon Photonics Platform
Gonzalez-Fernandez, Alfredo A.
Aceves-Mijares, Mariano
Perez-Diaz, Oscar
Hernandez-Betanzos, Joaquin
Dominguez, Carlos
[J]. CRYSTALS, 2021, 11 (06):
[8] CMOS-Compatible Tellurium/Silicon Ultra-Fast Near-Infrared Photodetector
Li, Linlin
Xu, Hao
Li, Zhexin
Liu, Lingchen
Lou, Zheng
Wang, Lili
[J]. SMALL, 2023, 19 (42)
[9] Silicon photonics - Polysilicon resonates toward CMOS-compatible 3-D networks
Overton, Gail
[J]. LASER FOCUS WORLD, 2008, 44 (02): : 25 - +
[10] CMOS-Compatible PECVD Silicon Carbide Platform for Linear and Nonlinear Optics
Xing, Peng
Ma, Danhao
Ooi, Kelvin J. A.
Choi, Ju Won
Agarwal, Anuradha Murthy
Tan, Dawn
[J]. ACS PHOTONICS, 2019, 6 (05) : 1162 - 1167

← 1 2 3 4 5 →