Plasmonic Terahertz Waveguide Based on Anisotropically Etched Silicon Substrate

被引：11
|
作者：
Li, Shanshan [1 ]
Jadidi, Mohammad M. [1 ]
Murphy, Thomas E. [1 ,2 ]
Kumar, Gagan [2 ]
机构：
[1] Univ Maryland, Dept Elect & Comp Engn, College Pk, MD 20742 USA
[2] Univ Maryland, Inst Res Elect & Appl Phys, College Pk, MD 20742 USA
来源：
IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY | 2014年 / 4卷 / 04期
关键词：
Anisotropic etching; plasmonics; subwavelength structures; SURFACES; METAMATERIAL; PROPAGATION; POLARITONS; WIRES;
D O I：
10.1109/TTHZ.2014.2325739
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We experimentally examine anisotropically etched silicon surfaces for terahertz (THz) plasmonic guided wave applications. Highly doped silicon surfaces are anisotropically etched to form a one-dimensional array of subwavelength concave pyramidal troughs. The plasmonic waveguides are found to support highly confined guided modes both in transverse and longitudinal directions. The resonant frequencies of the modes can be controlled by adjusting the geometrical parameters of the troughs. The existence of guided modes in plasmonic waveguides is also established through finite-element-based numerical simulations. These waveguides could provide a silicon-based alternative to metallic waveguides for use in future THz devices.
引用
收藏
页码：454 / 458
页数：5
相关论文
共 50 条
  • [1] Anisotropically Etched Silicon Surfaces for Planar Plasmonic Terahertz Guided Wave Devices
    Kumar, Gagan
    Li, Shanshan
    Jadidi, Mohammad M.
    Murphy, Thomas E.
    2014 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2014,
  • [2] Terahertz plasmonic waveguide based on periodically structured silicon surface
    Jadidi, Mohammad M.
    Kumar, Gagan
    Li, Shanshan
    Murphy, Thomas E.
    2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2013,
  • [3] PHOTOLUMINESCENCE OF ANISOTROPICALLY ETCHED SILICON
    GORBACH, TY
    RUDKO, GY
    SMERTENKO, PS
    SVECHNIKOV, SV
    VALAKH, MY
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1994, 58 (02): : 183 - 186
  • [4] On-chip terahertz bandpass filter based on substrate integrated plasmonic waveguide
    Zhu, Huali
    Zhang, Yong
    Ye, Longfang
    Li, Yukun
    Xu, Yuehang
    Xu, Ruimin
    RESULTS IN PHYSICS, 2021, 27
  • [5] Anisotropically etched silicon fibre-grippers
    Roland B. Gentemann
    Edgar Voges
    Microsystem Technologies, 2008, 14 : 167 - 171
  • [6] Anisotropically etched silicon fibre-grippers
    Gentemann, Roland B.
    Voges, Edgar
    MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2008, 14 (02): : 167 - 171
  • [7] A Terahertz Modulator Based on Graphene Plasmonic Waveguide
    Xiao, Binggang
    Sun, Runliang
    He, Jinlong
    Qin, Kang
    Kong, Sheng
    Chen, Jing
    Xiumin, Wang
    IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 27 (20) : 2190 - 2192
  • [8] Growth of horizontally aligned single-walled carbon nanotubes on anisotropically etched silicon substrate
    Orofeo, Carlo M.
    Ago, Hiroki
    Ikuta, Tatsuya
    Takahasi, Koji
    Tsuji, Masaharu
    NANOSCALE, 2010, 2 (09) : 1708 - 1714
  • [9] ANISOTROPICALLY ETCHED SILICON MIRRORS FOR OPTICAL SENSOR APPLICATIONS
    KWA, TA
    FRENCH, PJ
    WOLFFENBUTTEL, RF
    SARRO, PM
    HELLEMANS, L
    SNAUWAERT, J
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (04) : 1226 - 1233
  • [10] Process induced hillock defects on anisotropically etched silicon
    Tan, Song-sheng
    Han, Hongtao
    Boudreau, Robert
    Reed, Michael L.
    1600, Publ by IEEE, Piscataway, NJ, United States
12345