Three dimensional whispering gallery mode resonators and microlasers made by a combination of direct laser writing and soft nanoimprint lithography

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作者
Brenner, Philipp [1 ]
Bar-On, Ofer [2 ]
Siegle, Tobias [3 ]
Leonhard, Tobias [1 ]
Gvishi, Raz [4 ]
Eschenbaum, Carsten [1 ,5 ]
Kalt, Heinz [3 ]
Scheuer, Jacob [2 ]
Lemmer, Uli [1 ,5 ]
机构
[1] Karlsruhe Inst Technol, Light Technol Inst, Engesserstr 13, D-76131 Karlsruhe, Germany
[2] Tel Aviv Univ, Dept Phys Elect, IL-69978 Tel Aviv, Israel
[3] Karlsruhe Inst Technol, Inst Appl Phys, Wolfgang Gaede Str 1, D-76131 Karlsruhe, Germany
[4] Soreq NRC, Div Appl Phys, IL-81800 Yavne, Israel
[5] Karlsruhe Inst Technol, Inst Microstruct Technol, Hermann von Helmholtz Pl 1, D-76344 Eggenstein Leopoldshafen, Germany
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TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
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页数:1
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