Fabricating Nano Ribbons and Nano Fibers of Semiconductor Materials by Diamond Turning

被引:6
|
作者
Yan, Jiwang [1 ]
Gai, Xiaohui [2 ]
Kuriyagawa, Tsunemoto [1 ]
机构
[1] Tohoku Univ, Dept Nanomech, Aoba Ku, Sendai, Miyagi 9808579, Japan
[2] Tohoku Univ, Dept Met Mat Sci & Mat Proc, Aoba Ku, Sendai, Miyagi 9808579, Japan
关键词
Diamond Turning; Ductile Machining; Semiconductor; Silicon; Chip Formation; Nano Ribbon; Nano Fibber; Amorphous; Phase Transformation; SINGLE-CRYSTAL SILICON; PHASE-TRANSFORMATION; BUILDING-BLOCKS; GERMANIUM; INDENTATION; TRANSISTORS; NANOWIRES; DEVICES; MEMS;
D O I
10.1166/jnn.2009.C170
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Diamond turning tests have been made on single crystalline silicon wafers. It was found that chips removed from the material surface during machining consist of nano needles, nano ribbons and nano fibers, the shape and size of which depend on the undeformed chip thickness and the cutting edge geometry. Electron diffraction studies showed that the needle-type chips are micro-crystalline with slight amorphization; while the nano ribbons and nano fibers have been mostly transformed into the amorphous phase. This work preliminary demonstrated the feasibility of an efficient and inexpensive production method for mechanically flexible nano ribbons and nano fibers for micro-nano mechanical and electronic applications.
引用
收藏
页码:1423 / 1427
页数:5
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