A Novel Feature Detection Method Using Multi-Dimensional Image Fusion for Automated Optical Inspection on Critical Dimension

被引:0
|
作者
Chen, Liang-Chia [1 ,2 ]
Liang, Ching-Wen [3 ]
Hoang, Dinh-Cuong [1 ]
Duong, Duc-Hieu [3 ]
Chen, Chin-Sheng [3 ]
Lin, Shyh-Tsong [4 ]
机构
[1] Natl Taiwan Univ, Dept Mech Engn, Taipei 10617, Taiwan
[2] Natl Taipei Univ Technol, Inst Automat Technol, Taipei 10617, Taiwan
[3] Natl Taipei Univ Technol, Inst Automat Technol, Taipei 10608, Taiwan
[4] Natl Taipei Univ Technol, Dept Electroopt Engn, Taipei 10608, Taiwan
来源
JOURNAL OF THE CHINESE SOCIETY OF MECHANICAL ENGINEERS | 2018年 / 39卷 / 02期
关键词
Automated optical inspection (AOI); object segmentation; image fusion; point clouds; critical dimension (CD); EDGE-DETECTION;
D O I
暂无
中图分类号
TH [机械、仪表工业];
学科分类号
0802 ;
摘要
This paper presents a novel approach which is based on multi-dimension image fusion to effective extraction and segmentation of edge features for accurately measuring critical dimension on objects having complicated surface patterns or random reflectance. In the approach, coarse estimation of edge points is firstly performed by using the 3D edge detector to identify correct image regions of interest (ROI) for object segmentation. 2D image processing algorithms are performed on the ROI to segment the precise object edges for critical dimension (CD) measurement. To verify the effectiveness of the strategy, the developed method has been verified through measurement of aerospace composite parts for its edge detection and critical dimension accuracy. The measurement repeatability error of this critical dimension can be kept below 1.1% of the measured CD while the standard deviation can be kept less than 0.137 mm. Experimental results have demonstrated the feasibility and applicability of the developed method.
引用
收藏
页码:145 / 152
页数:8
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