THE CREATION OF MULTICOMPONENT GAS MIXTURES FOR ION-PLASMA TECHNOLOGIES

被引：0
|
作者：
Sysoiev, Yu. A. [1 ]
机构：
[1] Natl Aerosp Univ, Kharkiv Aviat Inst, Kharkov, Ukraine
来源：
PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY | 2014年 / 02期
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D O I：
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中图分类号：
O57 [原子核物理学、高能物理学];
学科分类号：
070202 ;
摘要：
A considered question is multicomponent gas mixtures creation for production of complex composition coatings in ion-plasma technologies. The developed methods for producing gas mixtures are based on a serial supply of gas component portions into the mixing chamber which providing a predetermined mixture composition with high accuracy. For methods implementation has been developed algorithms and software for microprocessor control system of created gas mixtures generator. This generator provides training three gases mixture with changeability of each gas percentage in range from 0 to 100 %, with working step of 1 % component content and error isn't more 0.1 % for each gas.
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页码：137 / 142
页数：6
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