Performance of Asynchronous Double-gate Poly-Si Thin-film Transistors

被引:0
|
作者
Ren, Yicheng [1 ]
Han, Dedong [1 ]
Sun, Lei [1 ]
Du, Gang [1 ]
Zhang, Shengdong [1 ]
Liu, Xiaoyan [1 ]
Wang, Yi [1 ]
机构
[1] Peking Univ, Inst Microelect, Beijing 100871, Peoples R China
基金
中国国家自然科学基金;
关键词
double-gate; polysilicon; thin-film transistor; asynchronous;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In our simulation, double-gate polycrystalline silicon thin-film transistors(DG p-Si TFTs) have been studied. We consider the effect of grain boundaries between the grains of polycrystalline silicon, and compared with the experiment. Then, considering the conventional work mode of the double-gate TFTs (DG TFTs), we compare the transfer characteristics of the DG TFT and traditional single-gate TFT (SG TFT). For the channel, the W/L equals to 1.5 mu m/1.5 mu m, the top and bottom SiO2 gate layer are same thickness 100nm. Also, the channel layer is intrinsic silicon and the thickness is 100nm. The DG TFT presents' a significant improvement in current drive and a steeper subthreshold slope. Mainly, we also demonstrate a novel asynchronous working mode, in which the back gate (V-BG) is settled to a fixed voltage. The back gate play a role of precharging the TFT, and we find a larger V-BG leads to a lower threshold voltage. Meanwhile, it should be observed that a large V-BG also results in a decrease of on/off ratio and a deterioration of the subthreshold slope. Thus, the compromise during the threshold voltage, on/off ratio and subthreshold slope is in need.
引用
收藏
页码:552 / 555
页数:4
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