Electron diffraction patterns of fibrous and lamellar textured polycrystalline thin films .2. Applications

Electron diffraction patterns of a sputter-deposited polycrystalline MgO thin film on an SiO2 substrate, of a Ta thin film and of CoCrTa/Cr bilayer films on glass substrates are presented and analyzed based on the theory developed in Paper I [Tang & Laughlin (1996). J Appl. Cryst. 29, 411-418]. It is found that the MgO film is [001] textured with a distribution angle of 13 degrees. The Ta film is composed both of randomly oriented grains and [011] textured grains. The [011] texture axis distribution angle of the Ta film is determined to be 11 degrees. (<11(2)over bar 0>)CoCrTa/(001)Cr and (<10(1)over bar 1>)CoCrTa/(011)Cr polycrystalline epitaxy are identified in the CoCrTa/Cr bilayer films. Both the bilayer films have a texture axis distribution angle of 6 degrees.