Degradation Behavior and Defect Analysis for SiC Power MOSFETs Based on Low-Frequency Noise Under Repetitive Power-Cycling Stress

被引:14
|
作者
Yang, Xiaodong [1 ]
Chen, Y. Q. [2 ]
Hou, Bo [2 ]
Xu, Xinbing [1 ]
Wang, Jingliang [1 ]
Huang, Yun [2 ]
Chen, Qiang [1 ]
Zhou, Changjian [1 ,3 ]
机构
[1] South China Univ Technol, Sch Elect & Informat Engn, Guangzhou 510000, Peoples R China
[2] Minist Ind & Informat Technol, 5 Elect Res Inst, Sci & Technol Reliabil Phys & Applicat Elect Comp, Guangzhou 510610, Peoples R China
[3] Guangdong Artificial Intelligence & Digital Econ, Guangzhou 510335, Peoples R China
关键词
Low-frequency noise (LFN); power-cycling; reliability; SiC power MOSFETs; SiC/SiO2; interface;
D O I
10.1109/TED.2020.3044018
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this article, the degradation behavior of the commercial 1.2-kV SiC power MOSFETs was investigated under repetitive power-cycling stress, and defect analysis based on low-frequency noise (LFN) was carried out. The experimental results show that increasing power-cycling stress results in a forward shift of threshold voltage and increasing ON-resistance. Meanwhile, the drain-to-source current significantly decreases with the increase of the cycles. Furthermore, the gate-source leakage current of the device became larger and the blocking characteristics deteriorated after 10-k cycles. The negative shift of the gate-capacitance versus gate-voltage curve was analyzed. Trap characterization was performed by using the LFN method, and it was found that the trap density of the device increased 5.47 times after 10-k cycles. The physical mechanism could be attributed to electrically active trapped charges generated at the SiC/SiO2 interface during power-cycling stress. This article may be helpful for degradation detection and fault analysis of SiC power MOSFETs in the electronic system.
引用
收藏
页码:666 / 671
页数:6
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