共 50 条
- [3] CVD growth and characterization of 3C-SiC thin films [J]. Bulletin of Materials Science, 2004, 27 : 445 - 451
- [5] Electrical characteristics of polycrystalline 3C-SiC thin films [J]. EDM 2007: 8TH INTERNATIONAL WORKSHOP AND TUTORIALS ON ELECTRON DEVICES AND MATERIALS, 2007, : 32 - 33
- [8] Characterization of electrical contacts on polycrystalline 3C-SiC thin films [J]. SILICON CARBIDE AND RELATED MATERIALS 2004, 2005, 483 : 745 - 748
- [10] Micromachining of thin 3C-SiC films for mechanical properties investigation [J]. B - SILICON CARBIDE 2010-MATERIALS, PROCESSING AND DEVICES, 2010, 1246