An active vibration isolation system using adaptive proportional control method

This paper is concerned with a six-degree-of-freedom active vibration isolation system using voice coil actuators with absolute velocity feedback control for highly sensitive measurement equipment, e.g. atomic force microscopes, suffering from building vibration. The main differences between this type of system and traditional isolator, is that there are no isolator resonance. The absolute vibration velocity signal acquired from an accelerator and being processed through an integrator is input to the controller as a feedback signal, and the controller output signal drives the voice coil actuator to produce a sky-hook damper force. In practice, the phase response of integrator at low frequency such as 2 similar to 6 Hz deviate from the 90 degree which is the exact phase difference between the vibration velocity and acceleration. Therefore, an adaptive filter is used to compensate the phase error in this paper. An analysis of this active vibration isolation system is presented, and model predictions are compared to experimental results. The results show that the proposed method significantly reduces transmissibility at resonance without the penalty of increased transmissibility at higher frequencies.