TECHNOLOGY AND TEST OF COPLANAR GROUNDED WAVE-GUIDES ON MICRO-MACHINED Si WAFERS

被引：0

作者：

Lucibello, Andrea ^{[1
]}

De Angelis, Giorgio ^{[1
]}

Proietti, Emanuela ^{[1
]}

Marcelli, Romolo ^{[1
]}

Bartolucci, Giancarlo ^{[1
]}

机构：

[1] CNR IMM Roma, I-00133 Rome, Italy

来源：

CAS: 2008 INTERNATIONAL SEMICONDUCTOR CONFERENCE, PROCEEDINGS | 2008年

关键词：

RF MEMS; micromachining;

D O I：

10.1109/SMICND.2008.4703374

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Coplanar wave-guide grounded lines (CPWG) have been designed, realized by micro-machining of high resistivity silicon wafers and tested up to 40 GHz. Different configurations have been compared between them by changing the dimensions of the micro-machined via-holes used for the ground connection, as well as their number and separation, to get the optimal electrical matching conditions. Wide-band matching and losses as low as 0.1-0.2 dB/mm have been obtained within the 40 GHz range, in agreement with the predicted behaviour.

引用

页码：219 / 222

页数：4

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