Laser Micromachining of Wide Bandgap Materials

被引：4
|
作者：
Dai, Y. T. [1 ]
Xu, G. [1 ]
Li, W. L. [1 ]
机构：
[1] Wuhan Univ Technol, Key Lab Fiber Opt Sensing Technol, Wuhan 430070, Peoples R China
来源：
ULTRA-PRECISION MACHINING TECHNOLOGIES | 2009年 / 69-70卷
关键词：
Deep ultraviolet laser; Micromachining; Silica glasses; Silica fibers; Diamond;
D O I：
10.4028/www.scientific.net/AMR.69-70.118
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
Owing to the large photo energy, 157nm laser is considered as one of promising micro-fabrication tools. In this paper, a micromachining system based on the 157nm laser is introduced. 2D laser direct-writing and 3D micro-structuring experiments are carried out for silica glasses, fibers and diamond. For natural diamond, the ablation threshold by 157nm laser is about 2.0J/cm(2). Material removal is dominantly due to photon-chemical effect for 157nm laser ablation. Effectiveness of using 157nm laser for 3D micromachining is clearly demonstrated.
引用
收藏
页码：118 / 122
页数：5
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