Development of a new UTM (Universal Testing Machine) system for the nano/micro in-process measurement

Micro UTM(Universal Testing Machines) are becoming increasingly popular for testing the mechanical properties of MEMS materials, metal thin films, and micro-molecule materials(1-2). And, new miniature testing machines that can perform in-process measurement in SEM, TEM, and SPM are also needed. In this paper, a new micro UTM with a precision positioning system that can be fine positioning stage. Coarse positioning is implemented by step motor. The size, load output and used in SEM, TEM, and SPM have been proposed. Bimorph type PZT precision actuator is used in displacement output of bimorph type UTM are 109(x)64(x)22(mm), about 35g, and 0.4 mm, respectively. And the displacement output is controlled in the block digital form. The results of the analysis and basic properties of positioning system and the UTM system are presented. In addition, the experiment results of in-process measurement during tensile load in SEM and AFM are showed.