Simultaneous mapping of out-of-plane and in-plane vibrations of MEMS with (sub)nanometer resolution

It is demonstrated that stroboscopic optical microscopy combined with image processing is able to detect and map in-plane bi-directional vibrations of microstructures at video rate with a detection limit down to 0.1 nm in the frequency bandwidth 0-4 MHz. Furthermore, this technique was combined with phase shifting stroboscopic interferometry and light pulse delay shifting to provide simultaneously amplitude and phase maps of out-of-plane and in-plane vibrations of micromechanical devices. Application of these techniques is illustrated on Al microdevices with pattern sizes in the micron range.