Depositing films from a supersonic jet of tetrafluoroethylene activated by interaction with a hot wire obstacle

被引：8
|
作者：
Rebrov, A. K. [1 ]
Safonov, A. I. [1 ]
Timoshenko, N. I. [1 ]
机构：
[1] Russian Acad Sci, Kutateladze Inst Thermal Phys, Siberian Branch, Novosibirsk 630090, Russia
来源：
TECHNICAL PHYSICS LETTERS | 2009年 / 35卷 / 05期
关键词：
47.40.-x; 47.45.-n; 68.55.-a; 82.35.-x;
D O I：
10.1134/S1063785009050022
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The deposition of fluoroplastic (Teflon) films on a substrate by the method of hot wire chemical vapor deposition has been experimentally studied. It is established that the structure of obtained coatings strongly depends on nonequilibrium processes in a supersonic jet of a gaseous precursor. The dependence of the film morphology on the wire temperature is demonstrated.
引用
收藏
页码：395 / 396
页数：2
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