Static and dynamic flow simulation of a KOH-etched microvalve using the finite-element method

In this paper, we present the simulation of the dow rate through a KOH-etched microvalve, which is part of an electrostatically actuated micropump. It is realized by a coupled simulation of liquid flow and structural displacement of the valve using the finite-element method (FEM). For this purpose, a new simulation method is developed to calculate the solid motion inside a liquid by a fluid-structural coupling. Thus the static and dynamic behaviour of the valve can be simulated in good agreement with measurements. In addition, an analytical model of the valve is developed, which allows the explanation of static as well as complex dynamic effects. In combination with analytical approaches, the simulations of the valve can be integrated into system simulations of a micropump. The results are of basic importance for the understanding and optimization of bidirectional silicon micropumps.