In situ surface analysis by low energy ion scattering

被引：8

作者：

van der Gon, AWD ^{[1
]}

Cortenraad, R ^{[1
]}

Jansen, WPA ^{[1
]}

Reijme, MA ^{[1
]}

Brongersma, HH ^{[1
]}

机构：

[1] Eindhoven Univ Technol, Fac Appl Phys, NL-5600 MB Eindhoven, Netherlands

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2000年 / 161卷

关键词：

low energy ion scattering; ion scattering spectroscopy; cathode; catalysis; surface;

D O I：

10.1016/S0168-583X(99)00673-4

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We discuss the possibilities to apply low energy ion scattering (LEIS) for in situ surface analysis of devices and functional materials. First we discuss the limitations imposed by the technique such as pressure and spatial resolution. Next, we present a new method to suppress backgrounds in LEIS spectra due to the presence of light elements by using a combined electrostatic and flight-time analysis. Examples of in situ analysis on thermionic cathodes are presented which shed light on the surface structure and composition of these cathodes, and also allow us to study the resistivity of such cathodes to ion bombardement. Finally, a design is presented for a pressure cell for in situ surface analysis of catalysts during catalytic reaction. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：56 / 64

页数：9

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