The On-line Detection System of Gas Mixture based on LabVIEW and MEMS Sensor arrays

被引：1

作者：

Wang Ting ^{[1
]}

Zhao Wenjie ^{[1
]}

Yu Yang ^{[1
]}

Shi Yunbo ^{[1
]}

机构：

[1] Harbin Univ Sci & Technol, Higher Educ Key Lab Measuring & Control Technol &, Harbin, Peoples R China

来源：

2014 FOURTH INTERNATIONAL CONFERENCE ON INSTRUMENTATION AND MEASUREMENT, COMPUTER, COMMUNICATION AND CONTROL (IMCCC) | 2014年

关键词：

The gas sensors array of MEMS; Gas mixture; On-line detection;

D O I：

10.1109/IMCCC.2014.152

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

The qualitative and quantitative detection of the gas mixture has significance meaning in the field, such as environmental protection, industrial control and poison gas alarm. However, the traditional semiconductor gas sensors have the defect of cross-sensitivity when measure the gas mixture. We designed a four-array MEMS gas sensor in order to overcome this defect, it could form a high-dimensional response mode to the detected gas which used the cross-sensitivity characteristics of the gas sensors. Meanwhile, we designed the PC software that based on LabVIEW, it could driver hardware circuit to acquire the signal of MEMS gas sensor and take pattern recognition algorithms. Finally, the types and contents of the detected gas is obtained. Experimental results of CO, SO2, NO2 and Cl2 is proved that the system could achieve the on-line quantitative detection of mixed gas.

引用

页码：716 / 720

页数：5

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