Flexible ferroelectret field-effect transistor for large-area sensor skins and microphones

被引:169
|
作者
Graz, Ingrid
Kaltenbrunner, Martin
Keplinger, Christoph
Schwodiauer, Reinhard
Bauer, Siegfried
Lacour, Stephanie P.
Wagner, Sigurd
机构
[1] Johannes Kepler Univ, A-4040 Linz, Austria
[2] Princeton Univ, Dept Elect Engn, Princeton, NJ 08544 USA
[3] Princeton Univ, Princeton Inst Sci & Technol Mat, Princeton, NJ 08544 USA
基金
奥地利科学基金会;
关键词
D O I
10.1063/1.2335838
中图分类号
O59 [应用物理学];
学科分类号
摘要
Ferroelectrets generate an electric field large enough to modulate the conductance of the source-drain channel of a thin-film field-effect transistor. Integrating a ferroelectret with a thin-film transistor produces a ferroelectret field-effect transistor. The authors made such transistors by laminating cellular polypropylene films and amorphous silicon thin-film transistors on polyimide substrates. They show that these ferrroelectret field-effect transistors respond in a static capacitive or dynamic piezoelectric mode. A touch sensor, a pressure-activated switch, and a microphone are demonstrated. The structure can be scaled up to large-area flexible transducer arrays, such as roll-up steerable compliant sensor skin. (c) 2006 American Institute of Physics.
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页数:3
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