High accuracy transfer printing of single-mode membrane silicon photonic devices

A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100 +/- 70nm. Silicon (Si) mu-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an underlying Si bus waveguide. Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License.