[1] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Inst Nanotechnol & Microsyst Engn, Tainan 701, Taiwan
[2] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Inst Microelect, Tainan 701, Taiwan
[3] Natl Cheng Kung Univ, Ctr Micro Nano Sci & Technol, Dept Elect Engn, Tainan 701, Taiwan