Nucleation of diamond on {111} surfaces of cubic boron nitride by CVD

被引:2
|
作者
Yanagihara, T [1 ]
机构
[1] Nihon Univ, Coll Engn, Dept Phys, Koriyama, Fukushima 9638642, Japan
关键词
diamond growth and characterization; nucleation; cubic boron nitride; CVD;
D O I
10.1016/j.diamond.2003.12.023
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Nucleation of diamond on hydrogenated {111} surfaces of c-BN cluster is investigated using the semiempirical molecular orbital method of AM I approximation. The heat of formation (HOF) at the first stage of growth has been calculated as a function of the charge given to clusters. The binding energies between gases (H, CH, CH2, CH3, C, and C-2) and c-BN have been calculated using the values of HOF and the important gases in the nucleation have been studied based on the nucleation theory. The CH and CH2 adsorbed on the {111} B surfaces exert positive influence on the nucleation by positive charges (+ 1 and +2), a pulsed positive charge (+ 1), and an alternating charge (+1 and -1) biased to the substrate. However, the abstractions of the H atoms from the {111}N surfaces are impeded because frontier orbitals of gases interact less effectively with frontier orbitals of the surface hydrogen atoms. (C) 2003 Elsevier B.V All rights reserved.
引用
收藏
页码:616 / 621
页数:6
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