Electron density and gas temperature from line broadening in an argon surface-wave-sustained discharge at atmospheric pressure

被引:69
|
作者
Christova, M
Castaños-Martinez, E
Calzada, MD
Kabouzi, Y
Luque, JM
Moisan, M
机构
[1] Univ Cordoba, Grp Espectroscopia Plasmas, Edificio Einstein, Cordoba 14071, Spain
[2] Tech Univ Sofia, Inst Appl Phys, BG-1797 Sofia, Bulgaria
[3] Univ Montreal, Grp Phys Plasmas, Montreal, PQ H3C 3J7, Canada
关键词
surface-wave plasma; microwave discharges; atmospheric pressure; emission spectroscopy; stark broadening; Van der Waals broadening; electron density diagnosis; gas temperature diagnosis;
D O I
10.1366/0003702041959415
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We have used the collisional broadening of neutral argon lines to determine the electron density and gas temperature of a microwave discharge at atmospheric pressure. The gas temperature can be obtained from the Van der Waals broadening, provided that the Stark broadening is negligible. This can be achieved by using lines from low-lying levels (close to the ground state). On the other hand, lines corresponding to transitions from high-lying levels, which are more sensitive to Stark (quadratic) broadening, can be utilized to determine electron density. The electron density values obtained from the quadratic Stark broadening of argon atoms are in reasonable agreement with those derived from the linear Stark broadening of the H-beta line. The proposed method ensures perturbation-free access to plasma parameters, which is not the case when adding hydrogen to the discharge, even in a small amount, to observe the Balmer series lines.
引用
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页码:1032 / 1037
页数:6
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