Estimation of parametric sensitivity for defects size distribution in VLSI defect/fault analysis

被引：0
|
作者：
Blyzniuk, M [1 ]
Kazymyra, I [1 ]
机构：
[1] Lviv Polytech Natl Univ, UA-79013 Lvov, Ukraine
来源：
2002 23RD INTERNATIONAL CONFERENCE ON MICROELECTRONICS, VOLS 1 AND 2, PROCEEDINGS | 2002年
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D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The parametric sensitivity of defect size distribution in VLSI defect/fault analysis is evaluated. The use of special software tool FIESTA for the computational experiment aimed at estimation of the significance of parameters in expressions approximating the actual defect distribution is considered. The obtained experimental results and their usefulness have been analysed.
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页码：547 / 550
页数：4
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