Reconfigurable liquid micro-lens system for variable fiber coupling

被引：0
|
作者：
Shaik, Riyaz P. [1 ]
Moench, Wolfgang [1 ]
Krause, Holger [1 ]
Zappe, Hans [1 ]
机构：
[1] Univ Freiburg, Dept Microsyst Engn IMTEK, Lab Microopt, D-79110 Freiburg, Germany
来源：
2008 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS | 2008年
关键词：
Liquid micro-lens; electrowetting on dielectrics; fiber coupling; variable optical attenuator;
D O I：
10.1109/OMEMS.2008.4607805
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A system capable of both two-dimensional lateral positioning and focusing of a liquid micro-lens for variable fiber coupling is presented. Lateral positioning and focus adjustment is accomplished by electrowetting-on-dielectrics. The chip is fabricated oil a transparent Pyrex substrate and is equipped with a two dimensional array of electrodes featuring a well-defined microstructure which allows accurate positioning of the liquid micro-lens. The system is used as a variable optical fiber coupling element, and measurements of optical power coupled to a fiber as a function of the applied voltage are presented. Applications such as adaptive wave front sensing, optical tweezers, or three-dimensional focus control for microscopy are envisaged.
引用
收藏
页码：15 / 16
页数：2
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