Processing and Error Compensation of Diffractive Optical Element

Diffractive optical element (DOE) shows high diffraction efficiency and good dispersion performance, which makes the optical system becoming light-weight and more miniature. In this paper, the design, processing, testing, compensation of DOE are discussed, especially the analyzing of compensation technology which based on the analyzing the DOE measurement date from Taylor Hobson PGI 1250. In this method, the relationship between shadowing effect with diamond tool and processing accuracy are analyzed. According to verification processing on the Taylor Hobson NANOFORM 250 lathe, the results indicate that the PV reaches 0.539 micron, the surface roughness reaches 4nm, the step position error is smaller than lambda/10 and the step height error is less than 0.23 micron after compensation processing one time.