The role of materials science in microelectronics: past, present and future

被引：3
|
作者：
Mahajan, S [1 ]
机构：
[1] Arizona State Univ, Dept Chem & Mat Engn, Tempe, AZ 85287 USA
来源：
PROGRESS IN MATERIALS SCIENCE | 2004年 / 49卷 / 3-4期
关键词：
D O I：
10.1016/S0079-6425(03)00027-6
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：487 / 509
页数：23
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