IMPROVED SENSITIVITY OF IONIC LIQUID-BASED PRESSURE SENSOR FOR BODY-ON-A-CHIP USING SIMULATION-BASED 3D LITHOGRAPHY

被引：0
|
作者：
Hirai, Yoshikazu [1 ]
Tsuji, Yusuke [1 ]
Kamei, Ken-ichiro [1 ]
Tsuchiya, Toshiyuki [1 ]
Tabata, Osamu [1 ]
机构：
[1] Kyoto Univ, Kyoto, Japan
来源：
2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2018年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the novel fabrication of highly sensitive ionic liquid-based pressure sensor integrated in a poly(dimethylsiloxane) microfluidic device. The proposed fabrication method provides an ability to simultaneous fabrication of the pressure sensor and microfluidic components by multilayer soft lithography. To improve the sensitivity in a low-pressure range, sensor structure and electrical output arc investigated by a numerical simulation. Then the analyzed sensor structure is precisely fabricated by three-dimensional (3D) lithography utilizing a numerical process optimization. Both numerical and experimental results revealed the sensor output depends on a cross section geometry of ionic liquid-filled channel, and confirmed the improved sensitivity.
引用
收藏
页码：511 / 514
页数：4
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