Thickness-dependent Magnetic and Microwave Resonance Characterization of Combined Stripe Patterned FeCoBSi Films

被引:8
|
作者
Zhang, Li [1 ,2 ]
Liu, Yaoming [1 ,2 ]
Zheng, Hanyu [1 ,2 ]
Zhu, Wenbin [1 ,2 ]
Zhang, Min [1 ,2 ]
Zhang, Linbo [1 ,2 ]
Zhou, Peiheng [1 ,2 ]
Chen, Haiyan [1 ,2 ]
Wang, Xin [1 ,2 ]
Lu, Haipeng [1 ,2 ]
Xie, Jianliang [1 ,2 ]
Deng, Longjiang [1 ,2 ]
机构
[1] Minist Educ, Natl Engn Res Ctr Electromagnet Radiat Control Ma, State Key Lab Elect Thin Films & Integrated Devic, Key Lab Multispectral Absorbing Mat & Struct, Chengdu 610054, Sichuan, Peoples R China
[2] Univ Elect Sci & Technol China, Sch Elect Sci & Engn, Chengdu 610054, Sichuan, Peoples R China
来源
基金
中国国家自然科学基金;
关键词
Soft magnetic materials; High frequency properties; EMI absorbers; THIN-FILMS; PERMEABILITY; ANISOTROPY; FREQUENCY;
D O I
10.1186/s11671-018-2506-5
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
In this paper, we fabricated a series of FeCoBSi multistoried patterned magnetic films with different thickness by traditional UV lithography method and DC sputtering deposition. Broad resonance band phenomenon was observed during high frequency property characterization, with full width half maximum (FWHM) of 4 GHz when the film thickness is 45 nm. The broad resonance band effect was contributed to the existence of multiple resonance peaks due to different stripe width of the combined stripe pattern, which induced distinguish shape anisotropic field in each stripe. Each resonance peak was independent due to the gap between the stripes, leading to a controllable method to tune the microwave properties of such structure. With thickness varied, the resonance band could be altered according to the mathematic prediction. This work presents an effective method for tuning the microwave resonance characterization in magnetization dynamic.
引用
收藏
页数:5
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