Photonic bands in patterned silicon-on-insulator waveguides

被引：29
|
作者：
Patrini, M [1 ]
Galli, M
Marabelli, F
Agio, M
Andreani, LC
Peyrade, D
Chen, Y
机构：
[1] INFM, I-27100 Pavia, Italy
[2] Univ Pavia, Dipartimento Fis A Volta, I-27100 Pavia, Italy
[3] CNRS, LPN, F-91460 Marcoussis, France
来源：
IEEE JOURNAL OF QUANTUM ELECTRONICS | 2002年 / 38卷 / 07期
关键词：
modeling; optical materials; reflectometry; waveguides;
D O I：
10.1109/JQE.2002.1017602
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
One- and two-dimensional photonic crystals are obtained by electron beam lithography and reactive ion etching on silicon-on-insulator waveguides. Variable-angle reflectance is measured and calculated in the 0.2-2-eV energy range, giving evidence of the quasi-guided modes of the photonic structure. Photonic bands in the one-dimensional case are determined and compare very well to those calculated with an expansion on the basis of the waveguide modes.
引用
收藏
页码：885 / 890
页数：6
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