Study of multi-functional image-aiming technology

被引：0
|
作者：
Liu, GD [1 ]
Ma, XL [1 ]
Zhang, SG [1 ]
Pu, ZB [1 ]
机构：
[1] Harbin Inst Technol, Dept Automat Measurement & Control, Harbin 150001, Peoples R China
来源：
PROCEEDINGS OF THE FIRST INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY | 1999年
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
This paper presents an image-aiming method which can not only take aim far profiles but also measure small-size workpieces directly by CCD imaging and image processing. The strongpoints of the method are that it improves the aiming accuracy and speed greatly. In addition, it can aim at the profiles if only the profiles images in the sensitive area of CCD. The aiming accuracy for linear profile is 0.070 mu m, for scale is 0.0069 mu m.
引用
收藏
页码：442 / 447
页数：6
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