SnO2 based gas sensitive sensor

被引：21
|
作者：
Bakin, AS
Bestaev, MV
Dimitrov, DT
Moshnikov, VA
Tairov, YM
机构：
[1] Electrotechnical University, St. Petersburg 197376
来源：
THIN SOLID FILMS | 1997年 / 296卷 / 1-2期
关键词：
gas sensors; thermal vacuum deposition; tin dioxide; annealing;
D O I：
10.1016/S0040-6090(96)09345-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
SnO2 films have been formed by the thermal vacuum deposition of Sn, pure Sn doped by Te and J(2) has been formed and also Sn doped by Cu with post-treatment under controlled oxygen atmosphere has been formed. Iodium had been introduced into the initial mixture as a SnJ(2) to form a better modified film surface for sensivity increase. The results of influence of annealing in dynamic vacuum conditions on SnO2 Alms properties are shown. (C) 1997 Elsevier Science S.A.
引用
收藏
页码：168 / 171
页数：4
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