Thermal Compensation for High Load Spatial Light Modulators in Real-Time

被引：0

作者：

Christopher, Peter J. ^{[1
]}

Mouthaan, Ralf ^{[1
]}

Kadis, Andrew ^{[1
]}

Gabbani, Nadeem ^{[1
]}

O'Neill, William ^{[1
]}

Wilkinson, Timothy D. ^{[1
]}

机构：

[1] Univ Cambridge, Engn Dept, Cambridge, England

来源：

2020 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2020年

基金：

英国工程与自然科学研究理事会;

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We introduce a concurrent real-time calibration process for diffractive lithography using liquid crystal spatial light modulators. This allows for increased power handling capabilities for given phase modulation accuracy. (C) 2020 The Author(s)

引用

页数：2

共 50 条

[1] 2 CELLULAR STRUCTURES FOR REAL-TIME SPATIAL LIGHT MODULATORS
ATHALE, RA
LEE, SH
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1981, 71 (12) : 1627 - 1627
[2] Real-time holographic display using spatial light modulators
[J]. Yamauchi, Makoto, 2000, Mechanical Engineering Lab, Sakura-mura, Japan (54):
[3] Real-time computation of diffraction fields for pixelated spatial light modulators
Esmer, G. Bora
[J]. OPTICS EXPRESS, 2015, 23 (10): : 12636 - 12647
[4] Pseudorandom phase-only encoding of real-time spatial light modulators
Cohn, RW
Liang, MH
[J]. APPLIED OPTICS, 1996, 35 (14): : 2488 - 2498
[5] PHOTOELECTRETIC STATES IN THE REAL-TIME SPATIAL LIGHT MODULATORS (PROM-SYSTEM)
LEBEDEVA, NN
MAMEDOV, AM
[J]. FERROELECTRICS, 1980, 27 (1-4) : 259 - 259
[6] Enumeration of illumination and scanning modes from real-time spatial light modulators
Ge, L
Duelli, M
Cohn, RW
[J]. OPTICS EXPRESS, 2000, 7 (12): : 403 - 416
[7] Ferroelectric liquid-crystal spatial light modulators for real-time holography
Fukushima, S
[J]. ALT '95 INTERNATIONAL SYMPOSIUM ON ADVANCED MATERIALS FOR OPTICS AND OPTOELECTRONICS, 1996, 2777 : 85 - 87
[8] Real-time multispot beam steering with electrically controlled spatial light modulators
Cohn, RW
[J]. OPTICAL SCANNING SYSTEMS: DESIGN AND APPLICATIONS, 1997, 3131 : 145 - 155
[9] Real-Time Diffraction Field Calculation Method for Spatial Light Modulators with Pixelated Structure
Esmer, G. Bora
[J]. 2016 24TH SIGNAL PROCESSING AND COMMUNICATION APPLICATION CONFERENCE (SIU), 2016, : 1557 - 1560
[10] Affordable real-time diffraction compensation in the spatial domain
Bloch, Shalom
Sternklar, Shmuel
Granot, Er'el
[J]. OPTIK, 2017, 150 : 99 - 110

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