In situ Grazing Incidence Scattering Investigations During Magnetron Sputtering Deposition of FePt/Ag Thin Films

A study was conducted to demonstrate the fabrication of granular L1 0- FePt and Ag films grown on SiO2 substrates through sequential deposition of FePt and Ag at 400 °C. Grazing incident small-angle X-ray scattering GISAXS) patterns were collected in situ during deposition to report evolution of nanostructures as the function of the Ag thickness. The GISAXS was used to conduct the investigations as it was a powerful tool to investigate in situ the morphology and distribution of nanostructures on a substrate surface or buried in a matrix. A dual magnetron deposition chamber equipped with two Be windows to allow X-ray penetration was mounted on the six-circle geniometer of the Rossendorf beam line (ROBL-BM20) to conduct in situ investigations of the FePt and Ag nanoparticles growth.