Atomic oxygen titration in a dioxygen microwave plasma .2. Recombination on titanium tubes

被引:0
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作者
Legrand, JC
Diamy, AM
机构
关键词
microwave; oxygen atom; plasma; recombination coefficient; titanium;
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O6 [化学];
学科分类号
0703 ;
摘要
The atomic oxygen concentration EOI in the post-discharge of a dioxygen microwave plasma (2450 MHz) was measured using chemical luminescence titration with NO2. These measurements are used to obtain heterogenous rate constants on an oxidized titanium surface. The apparent recombination coefficients gamma(a) are deduced [6.5 x 10(-4) (320 K), 4 x 10(-2) (350 K) and 3 x 10(-2) (400 K)] and compared with literature values for various metals and metal oxides.
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页码:1047 / 1054
页数:8
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