Growth of gallium nitride textured films and nanowires on polycrystalline substrates at sub-atmospheric pressures

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作者
Chandrasekaran, H [1 ]
Sunkara, MK [1 ]
机构
[1] Univ Louisville, Dept Chem Engn, Louisville, KY 40292 USA
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T [工业技术];
学科分类号
08 ;
摘要
Textured gallium nitride (GaN) films were grown on polished, polycrystalline and amorphous substrates in sub-atmospheric pressures, by direct nitradation of a thin molten gallium films using electron cyclotron resonance (ECR) microwave nitrogen plasma. C-plane texturing was achieved, independent of the substrate crystallinity. Single crystal quality GaN nanowires with diameters ranging from 40-50 nm were also synthesized using direct nitridation of thin gallium films with nitrogen plasma. Scanning electron microscopy (SEM), X-ray Diffraction (XRD), Energy Dispersive Spectroscopy (EDS) and Cross-sectional transmission electron microscopy (CS-TEM), high-resolution TEM (HRTEM) and Micro-Raman spectroscopy were used to characterize the synthesized gallium nitride films and GaN nanowires.
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页码:159 / 164
页数:4
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