Topographic measurements of precision-ground optical glasses

被引：5
|
作者：
Bennett, JM
Namba, Y
Guerra, JM
Jahanmir, J
Balter, TL
Podlesny, JC
机构：
[1] CHUBU UNIV,DEPT MECH ENGN,KASUGAI,AICHI 487,JAPAN
[2] POLAROID CORP,CAMBRIDGE,MA 02139
[3] WYKO CORP,TUCSON,AZ 85706
来源：
APPLIED OPTICS | 1997年 / 36卷 / 10期
关键词：
precision-ground glass; scanning force microscope; photon tunneling microscope; surface profiles;
D O I：
10.1364/AO.36.002211
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We studied the surfaces of six precision-ground optical glass samples of fused silica, BK-7, BaCD16, LaC14, NbF1, and LHG8 glass, using a mechanical profiler, a photon tunneling microscope, and a scanning force microscope. The measured roughnesses of the scanning force microscope varied from 3.5 Angstrom rms for BK-7 glass to 30 Angstrom rms for LHG8 laser glass. Good agreement was obtained among the roughness values measured with all three instruments. (C) 1997 Optical Society of America.
引用
收藏
页码：2211 / 2216
页数：6
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