共 50 条
- [1] Surface modification of high performance PBO fibers using radio frequency argon plasma [J]. SURFACE & COATINGS TECHNOLOGY, 2012, 206 (16): : 3534 - 3541
- [7] High selectivity plasma etching of silicon dioxide with a dual frequency 27/2 MHz capacitive radio frequency discharge [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (05): : 3276 - 3282
- [10] Reactor geometry and plasma uniformity in a planar inductively coupled radio frequency argon discharge [J]. PLASMA SOURCES SCIENCE & TECHNOLOGY, 1996, 5 (03): : 429 - 435