Mechanism for excimer-laser ablation in alkaline-earth metals

被引:12
|
作者
Nishikawa, H
Kanai, M
Szabo, G
Kawai, T
机构
[1] Osaka Univ, Inst Sci & Ind Res, Ibaraki, Osaka 5670047, Japan
[2] JATE Univ, Dept Opt & Quantum Elect, H-6720 Szeged, Hungary
来源
PHYSICAL REVIEW B | 2000年 / 61卷 / 02期
关键词
D O I
10.1103/PhysRevB.61.967
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The time-of-flight distribution and the amount of desorbed monovalent ion were measured for laser ablation of alkaline-earth metals. The experiment is performed using two wavelengths (193-nm ArF excimer laser and 248-nm KrF excimer laser), a fluence of less than 500 mJ/cm(2) and an effective pulse duration of 14-20 ns. Ion desorption occurs at a lower fluence than that predicted by a thermal evaporation model. The relationship between the amount of desorbed ion and the fluence shows highly nonlinear behavior. Based on the obtained results, a model is proposed in which the laser ablation of alkaline-earth metals is caused by the core electron ionization via the multiphoton photochemical process.
引用
收藏
页码:967 / 973
页数:7
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