Modeling approach for CVD-Diamond based mechanical structures

被引：0
|
作者：
Schmid, P [1 ]
Adamschik, M [1 ]
Ertl, S [1 ]
Gluche, P [1 ]
Kohn, E [1 ]
机构：
[1] Univ Ulm, Dept Electron Devices & Circuits, D-89069 Ulm, Germany
来源：
1999 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS | 1999年
关键词：
diamond; CVD; stress;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this study, mechanical structures based on polycrystalline diamond films grown on silicon substrate are investigated. In contrast to all-silicon MEMS, additional problems arise due to the unusual properties of diamond. These effects are investigated by modeling diamond-based micro-mechanical devices and comparing the results to measurements on processed devices. All simulations were carried out using the standard simulation tool ANSYS and measured modeling parameters.
引用
收藏
页码：636 / 639
页数：4
相关论文
共 50 条
  • [1] CVD-diamond optical lenses
    Woerner, E
    Wild, C
    Mueller-Sebert, W
    Koidl, P
    [J]. DIAMOND AND RELATED MATERIALS, 2001, 10 (3-7) : 557 - 560
  • [2] Novel thermal microactuator based on CVD-diamond films
    Gluche, P
    Leuner, R
    Kohn, E
    Rembe, C
    Wiesche, SAD
    Hofer, EP
    [J]. INTERNATIONAL ELECTRON DEVICES MEETING 1998 - TECHNICAL DIGEST, 1998, : 483 - 486
  • [3] Broadband electronics for CVD-diamond detectors
    Moritz, P
    Berdermann, E
    Blasche, K
    Stelzer, H
    Voss, B
    [J]. DIAMOND AND RELATED MATERIALS, 2001, 10 (9-10) : 1765 - 1769
  • [4] High electrical resistivity of CVD-diamond
    Manca, JV
    Nesladek, M
    Neelen, M
    Quaeyhaegens, C
    De Schepper, L
    De Ceuninck, W
    [J]. MICROELECTRONICS RELIABILITY, 1999, 39 (02) : 269 - 273
  • [5] Optical characterization of CVD-diamond films
    Kita, T
    Nagahara, S
    Nishino, T
    [J]. NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY, 2001, 11 (05): : 339 - 345
  • [6] A new acceptor state in CVD-diamond
    Garrido, JA
    Nebel, CE
    Stutzmann, M
    Gheeraert, E
    Casanova, N
    Bustarret, E
    Deneuville, A
    [J]. DIAMOND AND RELATED MATERIALS, 2002, 11 (3-6) : 347 - 350
  • [7] Wear behavior of CVD-diamond tools
    Uhlmann, E
    Brücher, M
    [J]. CIRP ANNALS-MANUFACTURING TECHNOLOGY, 2002, 51 (01) : 49 - 52
  • [8] HREM STUDIES OF CVD-DIAMOND FILMS
    HUTCHISON, JL
    SHECHTMAN, D
    [J]. ELECTRON MICROSCOPY AND ANALYSIS 1993, 1993, (138): : 263 - 266
  • [9] Optical position sensitive detectors based on CVD-diamond samples
    Mazzeo, G
    Salvatori, S
    Rossi, MC
    Della Scala, A
    Conte, G
    [J]. SENSORS AND MICROSYSTEMS, PROCEEDINGS, 2004, : 515 - 520
  • [10] DEVELOPMENT OF A DETECTOR BASED ON A CVD-DIAMOND FOR THE USE IN RADIOTHERAPY FACILITIES
    Akulinichev, S. V.
    Klenov, V. S.
    Kravchuk, L. V.
    Lebedev, S. G.
    Feschenko, A. V.
    Yants, V. E.
    [J]. PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2006, (03): : 134 - 136
12345