Determine the dynamic parameters in mechanical system of the crab-shaped MEMS vibratory gyroscope

被引：1
|
作者：
Vu, Van The [1 ]
Chu, Duc Trinh [2 ]
机构：
[1] Le Quy Don Tech Univ, Hanoi, Vietnam
[2] Vietnam Natl Univ, Hanoi, Vietnam
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2021年 / 27卷 / 09期
关键词：
10;
D O I：
10.1007/s00542-020-05128-6
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The inertial element, damping element and elastic element are the main components of a mechanical oscillation system. The values of these elements affect the resonant frequency of the mechanical system in a MEMS vibratory gyroscope. Besides, it is a necessary factor to determine the operating frequency of the mechanical system. In the mechanical system of the MEMS vibratory gyroscope, the elastic elements such as the elastic beams are directly connected with the proof-mass. The typical dynamic parameters of the oscillator system need to be determined to study the vibration characteristics of the MEMS vibratory gyroscope with some initial conditions. The construction of modeling and calculation of the dynamic parameters of a crab-shaped MEMS vibratory gyroscope which consists of a proof-mass with 2 in-plane degree-of-freedoms realized in this paper.
引用
收藏
页码：3429 / 3435
页数：7
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