A Hybrid Genetic Algorithm-Neural Network for Modeling of Periodic Nonlinearity in Three-Longitudinal-Mode Laser Heterodyne Interferometer

被引：0
|
作者：
Olyaee, Saeed [1 ,2 ]
Ebrahimpur, Reza [1 ,2 ]
Esfandeh, Somayeh [1 ,2 ]
机构：
[1] Shahid Rajaee Teacher Training Univ, Fac Elect & Comp Engn, Nanophoton & Optoelect Res Lab NORLab, Tehran, Iran
[2] Shahid Rajaee Teacher Training Univ, Fac Elect & Comp Engn, Brain & Intelligent Syst Res Lab BISLab, Tehran, Iran
来源：
2013 21ST IRANIAN CONFERENCE ON ELECTRICAL ENGINEERING (ICEE) | 2013年
关键词：
Artificial neural network; Genetic algorithm; Heterodyne interferometer; Multi-layer perceptrons; Nonlinearity error; COMPENSATION; ERROR;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Laser heterodyne interferometer is a common nanometrology system which is used for high-accuracy displacement measurements in industry. Measurement accuracy in this system is limited by the periodic nonlinearity error. In this paper, the nonlinearity error of the nano-metrology interferometric system based on three-longitudinal-mode laser heterodyne interferometer has been modeled by artificial neural network (ANN) and hybrid genetic algorithm-neural network (hybrid GA-ANN). The real code version of genetic algorithm (GA) is used. Genetic operators and parameters are set and designed accurately for optimizing the neural network. The results indicate that nonlinearity error can be effectively modeled by hybrid GA-ANN method and contains minimum mean square error (MSE) compared to the neural network.
引用
收藏
页数：5
相关论文
共 50 条
  • [1] Jones matrix analysis of frequency mixing error in three-longitudinal-mode laser heterodyne interferometer
    Olyaee, S.
    Yoon, T. H.
    Hamedi, S.
    [J]. IET OPTOELECTRONICS, 2009, 3 (05) : 215 - 224
  • [2] Efficient performance of neural networks for nonlinearity error modeling of three-longitudinal-mode interferometer in nano-metrology system
    Olyaee, Saeed
    Hamedi, Samaneh
    Dashtban, Zahra
    [J]. PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2012, 36 (03): : 379 - 387
  • [3] Frequency-path modeling for three-longitudinal-mode interferometer
    Olyaee, Saeed
    Nejad, Shahram Mohammad
    [J]. 2006 13TH IEEE INTERNATIONAL CONFERENCE ON ELECTRONICS, CIRCUITS AND SYSTEMS, VOLS 1-3, 2006, : 1360 - 1363
  • [4] A hybrid genetic algorithm-neural network strategy for simulation optimization
    Wang, L
    [J]. APPLIED MATHEMATICS AND COMPUTATION, 2005, 170 (02) : 1329 - 1343
  • [5] Estimation of groundwater level using a hybrid genetic algorithm-neural network
    Hosseini, Z.
    Nakhaei, M.
    [J]. POLLUTION, 2015, 1 (01): : 9 - 21
  • [6] Mining Medical Opinions Using Hybrid Genetic Algorithm-Neural Network
    Jotheeswaran, Jeevanandam
    Koteeswaran, S.
    [J]. JOURNAL OF MEDICAL IMAGING AND HEALTH INFORMATICS, 2016, 6 (08) : 1925 - 1928
  • [7] A HYBRID MASTER-SLAVE GENETIC ALGORITHM-NEURAL NETWORK APPROACH FOR MODELING A PIEZOELECTRIC ACTUATOR
    Trabia, Mohamed B.
    Saadeh, Mohammad Y.
    [J]. PROCEEDINGS OF THE ASME CONFERENCE ON SMART MATERIALS, ADAPTIVE STRUCTURES AND INTELLIGENT SYSTEMS, VOL 1, 2012, : 281 - 294
  • [8] Hybrid genetic algorithm-neural network: Feature extraction for unpreprocessed microarray data
    Tong, Dong Ling
    Schierz, Amanda C.
    [J]. ARTIFICIAL INTELLIGENCE IN MEDICINE, 2011, 53 (01) : 47 - 56
  • [9] A HYBRID GENETIC ALGORITHM-NEURAL NETWORK APPROACH FOR PRICING CORES AND REMANUFACTURED CORES
    Seidi, M.
    Kimiagari, A. M.
    [J]. SOUTH AFRICAN JOURNAL OF INDUSTRIAL ENGINEERING, 2010, 21 (02): : 131 - 148
  • [10] Modeling and Compensation of Periodic Nonlinearity in Two-mode Interferometer Using Neural Networks
    Olyaee, Saeed
    Ebrahimpour, Reza
    Hamedi, Samaneh
    [J]. IETE JOURNAL OF RESEARCH, 2010, 56 (02) : 102 - 110
12345