Optimal design of a tuning fork gyroscope and its testing experiment

被引：0
|
作者：
Dong, Y [1 ]
Tay, FEH [1 ]
Wen, Y [1 ]
Yuan, X [1 ]
Chen, WT [1 ]
机构：
[1] Inst Mat Res & Engn, Singapore 117602, Singapore
来源：
2000 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, TECHNICAL PROCEEDINGS | 2000年
关键词：
optimization; gyroscope; eigenfrequency; testing;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The eigenfrequency of a MEMS Tuning Fork Gyroscope (TFG) is calculated using a formula derived from Rayleigh method. From this formula, the objective function for the optimal design is established. Then two methods to solve the objective function are introduced. The TFG has also been fabricated using SOI technologies based on the optimum design. Driving testing results show good agreement between the calculated and the experimental eigenfrequencies.
引用
收藏
页码：621 / 623
页数：3
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